Discharge structure of Ar/Cl2 inductively coupled plasma: A cyclic study of discharge conditions at fixed power. The Journal of Technological and Space Plasmas, [S. l.], v. 6, n. 1, p. 218–249, 2025. DOI: 10.31281/p8p08506. Disponível em: https://www.jtsp.eu/jtsp/article/view/40.. Acesso em: 12 jul. 2025.