Influence of process parameters including the confining magnetic field of a plasma beam source on the deposition of N‐doped hydrogenated carbon films. The Journal of Technological and Space Plasmas, [S. l.], v. 4, n. 1, p. 140–150, 2023. DOI: 10.31281/jtsp.v4i1.29. Disponível em: https://www.jtsp.eu/jtsp/article/view/29.. Acesso em: 25 jul. 2024.